Ironless linear motors suitable for vacuum applications

Vacuum compatible linear motors

  • Ironless technology
  • For vacuum applications
  • Continuous force 4N to 336N
  • High force density
  • Description
  • Good to know

  • Downloads

These vacuum compatible ironless linear motors provide high continuous and peak forces without cogging (zero cogging). The ironless linear drives have a high motor constant and are available in multiple coil lengths. Typical applications include high-precision axes for positioning, motion profiling and speed control in wafer handling and inspection machines, photovoltaic and lithium battery systems, glass and LCD equipment, biomedical devices, printing machines and laser processing machines.

What is the maximum payload, the engine can move?
According to Newtonian law F = ma, the force is proportional to mass and acceleration. As long as the force can overcome the friction force, a heavy mass can therefore be moved with a relatively small force, except that the acceleration of this mass is low. For example, an AUM2-S2 engine with a peak force of 88 N can move a load of 10 kg with a maximum acceleration of 8.8 m/s ² when moving horizontally.

What about the maximum payload in vertical orientation?
In vertical movements, the engine must overcome gravity and additionally provide a force for vertical upward movement (F = mg + ma). In this case, the maximum load is determined by the maximum force divided by 9.81 m/s ². If the vertical force needs to be continuously maintained, the maximum load is the continuous power of the engine. For example, the maximum vertical load of the AUM2-S2 engine is 2.2 kg, since the continuous force of this engine is 22 N. If the load is borne by a counterweight (such as a spring), the AUM2-S2 engine can move a higher load in a vertical position.

What is the top speed of an engine or module?
There is no theoretical limit to the speed of a linear engine because there is no contact. However, speed is typically limited by the mechanical bearings. For example, the maximum speed for linear control systems with rails and guide cars is usually limited to 5m/s. Therefore, the speed for linear motors in most applications is limited to 5m/s. The use of ceramic ball bearings allows speeds of up to 10m/s. By using air bearings, higher speeds can also be possible.

What is the maximum length of a linear engine?
There is no length limit for linear motors. This is because the engine tracks can be connected to each other in sections. The linear rails can also be connected to each other. The linear scale for donor repatriation can be delivered in large lengths as well. Therefore, linear engine applications can be built up to 20m or even longer.

What happens to a linear motor, if the power supply is suddenly cut off?
If the current is suddenly interrupted, a linear motor can move on under its own inertia, until it encounters the final attack or comes to a halt due to friction force. This is not usually a problem, but it can be a problem for some applications. It is possible to install a brake with the linear motor, which will be activated, when power interrupts. In this way, the engine can stop immediately. Such a brake is typically installed on the rails of the linear guidance.

Are linear motors suitable for cleanroom applications?
Linear Motors can be used in cleanroom environments. In fact, many front-end semiconductor applications have linear motors in use. In wafer manufacturing plants, high-precision lithography machines, for example, use linear motors in XY positioning tables with very high accuracy (nanometer resolution) and submicron accuracy in cleanroom classes according to ISO 2.

How does the magnetic field of linear motors affect?
The magnetic field has a very low range. The field strength decreases with the third potency of the distance.
After about 100mm, the magnetic field is weaker than the geomagnetic field. If the magnetic trajectories are still shielded by iron, for example at the torque engines, virtually no magnetic field can be measured outside the housing.

Article No. Continuous force Peak force Motor track length Feature/Option Images 3D Data sheet Enquiry Wishlist
AWM1 4N-13N 17N-51N 62mm-104mm High dynamic Enquiry Enquiry
AWM2 12N-47N 59N-236N 119mm-299mm High dynamic Enquiry Enquiry
AWM3 37N-110N 187N-560N 179mm-599mm High dynamic Enquiry Enquiry
AWM4 64N-192N 360N-1082N 179mm-599mm High dynamic Enquiry Enquiry
AWM5 112N-336N 805N-2415N 251mm-587mm High dynamic Enquiry Enquiry